Verhaverbeke, Steven: search on Z-Library

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1

Wet Cleaning of Trenches and Vias after Oxide/Nitride Dry Etch with Cu Exposed

Verhaverbeke, Steven, Shao, Jason Chi-Hao, Liu, Lewis

Journal:

Solid State Phenomena

Year:

2001

File:

PDF, 308 KB

2001

2

Handbook for Cleaning/Decontamination of Surfaces || Cleaning of Trace Metallic Impurities from Solid Substrates Using Liquid Media

Verhaverbeke, Steven

Year:

2007

Language:

english

File:

PDF, 3.64 MB

english, 2007

3

Recent Advances in Wet Processing Technology and Science

Verhaverbeke, Steven, Messoussi, Rochdi, Morinaga, Hitoshi, Ohmi, Tadahiro

Journal:

MRS Proceedings

Year:

1995

Language:

english

File:

PDF, 618 KB

english, 1995

4

Aqueous Based Single Wafer Cu/Low-k Cleaning Process Characterization and Integration into Dual Damascene Process Flow

Tang, Jian She, Brown, Brian J., Verhaverbeke, Steven, Chen, Han Wen, Papanu, Jim, Hung, Raymond, Cai, Cathy, Yost, Dennis

Journal:

Solid State Phenomena

Year:

2005

Language:

english

File:

PDF, 903 KB

english, 2005

5

Cluster-Tool Integrated HF Vapor Etching for Native Oxide Free Processing

Werkhoven, Chris, Granneman, Ernst, Kwakman, Loek, Hendriks, Menso, Verhaverbeke, Steven, Heyns, Marc, Bender, Hugo

Journal:

MRS Proceedings

Year:

1993

Language:

english

File:

PDF, 853 KB

english, 1993

6

[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - Novel Wet Photoresist Strip for Wafer Level Packaging

Verhaverbeke, Steven, Zhao, Jun

Year:

2007

Language:

english

File:

PDF, 211 KB

english, 2007

7

A Model for the Etching of Ti and Tin in SC-1 Solutions

Verhaverbeke, Steven, Parker, Jennifer W.

Journal:

MRS Proceedings

Year:

1997

Language:

english

File:

PDF, 1.55 MB

english, 1997

8

Surfactant Selection for AM Clean in a Single Wafer Oasis Wet System

Baker, Jennifer, Beaudry, Christopher, Morinaga, Hitoshi, Verhaverbeke, Steven

Journal:

Solid State Phenomena

Year:

2003

File:

PDF, 277 KB

2003

9

SPIE Proceedings [SPIE Photomask Technology 2005 - Monterey, California (Monday 3 October 2005)] 25th Annual BACUS Symposium on Photomask Technology - Advanced mask cleaning techniques for sub-100-nm technology nodes

Papanu, James S., Weed, J. Tracy, Martin, Patrick M., Gouk, Roman, Franklin, Cole, Chen, Han-Wen, Verhaverbeke, Steven, Ko, Alexander, Child, Kent, Boelen, Pieter, Shrauti, Suresh, Martinez, Elias, Br

Year:

2005

Language:

english

File:

PDF, 419 KB

english, 2005

10

Contactless bottom-up electrodeposition of nickel for 3D integrated circuits

Zhao, Mingrui, Balachandran, Rajesh, Patterson, Zach, Gouk, Roman, Verhaverbeke, Steven, Shadman, Farhang, Keswani, Manish

Journal:

Year:

2015

Language:

english

File:

PDF, 946 KB

english, 2015

11

Generation at Point-of-Use of BHF

Verhaverbeke, Steven, Liu, L.H.

Journal:

Solid State Phenomena

Year:

1999

File:

PDF, 491 KB

1999

12

SPIE Proceedings [SPIE 22nd European Mask and Lithography Conference - Dresden, Germany (Monday 23 January 2006)] 22nd European Mask and Lithography Conference - Advanced processes for photomask damage-free cleaning and photoresist removal

Papanu, James S., Gouk, Roman, Chen, Han-Wen, Boelen, Pieter, Peters, Phillip, Belisle, Michael, Verhaverbeke, Steven, Ko, Alexander, Child, Kent, Martinez, Elias, Behringer, Uwe F. W.

Year:

2006

Language:

english

File:

PDF, 195 KB

english, 2006

13

Mechanism and Principles of Post Etch Al Cleaning with Inorganic Acids

Verhaverbeke, Steven, Gouk, Roman, Papanu, Jim, Chen, Han Wen

Journal:

Solid State Phenomena

Year:

2008

Language:

english

File:

PDF, 1.02 MB

english, 2008

14

Metallic Contamination Removal Evaluation for Single Wafer Processing

Boelen, Pieter, Verhaverbeke, Steven, Garnier, Philippe, Levy, Didier, Morinaga, Hitoshi

Journal:

Solid State Phenomena

Year:

2003

File:

PDF, 328 KB

2003

15

Facile Synthesis of Bimetallic Ag/Ni Core/Sheath Nanowires and Their Magnetic and Electrical Properties

Maureen McKiernan, Jie Zeng, Sunzida Ferdous, Steven Verhaverbeke, Kurtis S. Leschkies, Roman Gouk, Christopher Lazik, Miao Jin, Alejandro L. Briseno, Younan Xia

Journal:

Year:

2010

Language:

english

File:

PDF, 712 KB

english, 2010

16

Novel Texture Etch Chemistry for Transparent Conducting Oxides Used in Photovoltaic Cells

Verhaverbeke, Steven, Gouk, Roman, Leschkies, Kurtis, Visser, Robert

Journal:

Solid State Phenomena

Year:

2012

Language:

english

File:

PDF, 646 KB

english, 2012

17

A Novel Vapor Phase Etching Process for Si

Verhaverbeke, Steven

Journal:

Solid State Phenomena

Year:

2009

Language:

english

File:

PDF, 10.73 MB

english, 2009

18

Critical Parameters for Obtaining Low Particle Densities on a Si Surface in an HF-Last Process

Alay, Josep-Lluís, Verhaverbeke, Steven, Vandervorst, Wilfried, Heyns, Marc

Journal:

Japanese Journal of Applied Physics

Year:

1993

File:

PDF, 600 KB

1993

19

Using Megasonics for Particle and Residue Removal in Single Wafer Cleaning

Verhaverbeke, Steven, Gouk, Roman, Yost, Dennis

Journal:

Solid State Phenomena

Year:

2005

Language:

english

File:

PDF, 286 KB

english, 2005

20

The Role of HO2− in SC-1 Cleaning Solutions

Verhaverbeke, Steven, Parker, Jennifer W., McConnell, Chris F.

Journal:

MRS Proceedings

Year:

1997

Language:

english

File:

PDF, 508 KB

english, 1997

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